Contact layout design rules

5.1

Exact poly contact size

 2

 2

 2

 2

 2

0.16

5.2

Poly overlap of contact

 2

 2

 2

  1.5

  1.5

0.08

5.3

Contact space over poly

 5

 5

 6

 4

 2

0.20

5.4

Poly contact to channel space

 3

 4

 4

 2

 2

0.16

6.1

Exact diffusion contact size

 2

 2

 2

 2

 2

0.16

6.2a

Ndif, pdif overlap of contact

 2

 2

 2

 2

 2

0.08

6.2b

Ntie, ptie overlap of contact

 2

 2

 2

 2

 2

0.08

6.3a

Contact space over ndif, pdif

 5

 5

 6

 4

 2

0.20

6.3b

Contact space over ntie, ptie

 5

 5

 6

 4

 2

0.20

6.4

Ndif, pdif contact to channel space

 3

 3

 4

 2

 2

0.12