vlsitechnology.org /layout_rules /via1 & metal-2 | |
Via1 and metal-2 layout design rules |
Design rules
No. | Description | pharosc | sxlib | scmos-DEEP | scmos | Generic 0.13µm | ||
---|---|---|---|---|---|---|---|---|
vsc | vx | |||||||
8.1 |
Exact via1 size |
2 |
2 |
2 |
3 |
2 |
0.20 |
|
8.2 |
via1 space |
6 |
6 |
8 |
3 |
3 |
0.24 |
|
8.3a |
metal-1 side overlap of via1 |
1 |
1 |
1 |
1 |
1 |
0.01 |
|
8.3b |
metal-1 end overlap of via1 |
2 |
2 |
1 |
1 |
1 |
0.06 |
|
9.1 |
metal-2 width |
4 |
4 |
4 |
3 |
3 |
0.22 |
|
9.2 |
metal-2 space |
4 |
4 |
6 |
3 |
3 |
0.22 |
|
9.3a |
metal-2 side overlap of via1 |
1 |
1 |
1 |
1 |
1 |
0.01 |
|
9.3b |
metal-2 end overlap of via1 |
2 |
2 |
1 |
1 |
1 |
0.06 |
|
metal-1/via1 side pitch |
A | 8 |
8 |
8 |
8 |
6 |
0.44 |
|
metal-1/via1 end pitch |
B | 10 |
10 |
8 |
8 |
6 |
0.50 |
|
metal-2/via1 side pitch |
C | 8 |
8 |
10 |
8 |
6 |
0.44 |
|
metal-2/via1 end pitch |
D | 10 |
10 |
10 |
8 |
6 |
0.54 |
Notes.
VIA1 and METAL-2 layout design rules