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Via1 and metal-2 layout design rules

Design rules

No. Description pharosc sxlib scmos-DEEP scmos Generic 0.13µm
vsc vx

8.1

Exact via1 size

 2

 2

 2

 3

 2

0.20

8.2

via1 space

 6

 6

 8

 3

 3

0.24

8.3a

metal-1 side overlap of via1

 1

 1

 1

 1

 1

0.01

8.3b

metal-1 end overlap of via1

 2

 2

 1

 1

 1

0.06

9.1

metal-2 width

 4

 4

 4

 3

 3

0.22

9.2

metal-2 space

 4

 4

 6

 3

 3

0.22

9.3a

metal-2 side overlap of via1

 1

 1

 1

 1

 1

0.01

9.3b

metal-2 end overlap of via1

 2

 2

 1

 1

 1

0.06

metal-1/via1 side pitch

 A

 8

 8

 8

 8

 6

0.44

metal-1/via1 end pitch

 B

10

10

 8

 8

 6

0.50

metal-2/via1 side pitch

 C

 8

 8

10

 8

 6

0.44

metal-2/via1 end pitch

 D

10

10

10

 8

 6

0.54

Notes.

  1. The via1/metal-2 rules are repeated for via2/metal-3 etc. up to the penultimate layers. The top metal layer and the via layer connecting to it have larger dimensions which are not (yet) listed here.

via1 & metal-2 layout rules
VIA1 and METAL-2 layout design rules