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Metal-1 layout design rules

Design rules

No. Description pharosc sxlib scmos-DEEP scmos Generic 0.13µm
vsc vx

7.1

metal-1 width

 4

 4

 2

 3

 3

0.18

7.2

metal-1 space

 3

 4

 4

 3

 2

0.18

7.3a

metal-1 side overlap of contact

 1

 1

 1

 1

 1

0.01

7.3b

metal-1 end overlap of contact

 2

 2

 1

 1

 1

0.06

7.4

wide metal-1 space

 5

 5

 -

 -

 -

0.22

for metal-1 width

greater than or equal to

and less than

for parallel runs greater than or equal to
W

 5

 5

 -

 -

 -

0.26

28

28

 -

 -

 -

1.54
L

12

12

 -

 -

 -

0.66

Notes.

  1. Wide metal-1 rule for widths up to 28λ applies to supply lines inside standard cells. For parallel runs less than the minimum value of L the rule is the standard metal-1 spacing. Metal-1 widths above 28λ have larger spacing rules which are not listed here.

metal-1 layout rules
METAL-1 layout design rules